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铁电薄膜开关特性测量
Measurement for Switching Characteristics of Ferroelectric Thin Films
【摘要】 对铁电薄膜的开关特性进行了分析.介绍了利用美国HP4192A低频阻抗分析仪设计铁电薄膜开关特性测量仪的方法.讨论了测量原理以及如何利用测量仪所产生的双极性双脉冲对铁电薄膜的开关特性进行测量,给出了有关PZT(55/45)铁电薄膜样品的测量结果
【Abstract】 The switching characteristics of ferroelectric thin films are analyzed. The ways and means are described utilizing American HP4192A LF Impedance Analyzer to design a measuring instrument of switching characteristics with ferroelectric thin film. The measuring principle and the use of bipolar double pulse generated by measuring instrument for measuring switching characteristics with ferroelectric thin films are discussed. Measurement result of the samples of PZT(55/45) ferroelectric thin films is given.
【关键词】 铁电薄膜;
开关特性;
测量;
双极性双脉冲;
【Key words】 ferroelectric thin films; swithching characteristics; measurement; bipolar double pulse;
【Key words】 ferroelectric thin films; swithching characteristics; measurement; bipolar double pulse;
【基金】 国家高技术研究发展计划资助
- 【文献出处】 华中理工大学学报 ,JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY , 编辑部邮箱 ,1999年06期
- 【分类号】TP17
- 【被引频次】3
- 【下载频次】111