【摘要】 介绍了电子束蒸发ＷＯ３膜和以该膜为敏感材料的Ｈ２Ｓ气体传感器工艺，分析了膜的灵敏度和膜的稳定性以及掺金和分步热处理对器件性能的影响更多还原

【Abstract】 Using electron beam evaporation on ceramic substrate of Al 2O 3, tungsten oxide films were prepared and H 2S gas sensors with the films were made. Electron beam evaporation, gold doping and step heat treatment were used in order to obtain better sensitivity, stability and selectivity in the films. The sensing mechanisms of tungsten oxide films were also discussed.更多还原