【摘要】 讨论了用于高频磁阻抗效应传感技术的ＮｅＦｅ软磁薄膜制备和薄膜单轴各向异性产生方法及机理．用射频磁控溅射法在几十ｋＡ／ｍ磁场定向下制备出具有一定单轴各向异性的Ｎｉ８１Ｆｅ１９软磁薄膜，并对所测得的薄膜各种磁化曲线进行了分析更多还原

【Abstract】 NiFe soft magnetic thin films fabricated for high frequency magnetic impedance effect are discussed. The method used to cause uniaxial anisotropy of films is investigated and its mechanism analyzed. When applied several tens kA/m in plane magnetic field along a specific direction, a soft magnetic thin film with uniaxial anisotropy is obtained. A sort of hysteresises of thin films are measured and analyzed.更多还原