【摘要】 面阵红外焦平面结构由于具有体积小、重量轻、功耗低、噪声小、灵敏度和可靠性高等特点而在军事及民用领域获得了应用，国外已有文献报道填充系数为４０％左右的面阵红外焦平面凝视阵列的情况，国内也已制成了填充系数为３５％的面阵肖特基势垒红外焦平面阵列．红外焦平面阵列的红外响应均匀性及空间分辨率和灵敏度是衡量其性能优劣的几项重要指标．通常情况下，空间分辨率的提高可以采取缩小像素面积，增大阵列规模来实现，但像素的减小将导致信号的减弱．为改善具有低填充系数的红外焦平面器件的性能可以采取增大器件的填充系数以获得足够的信噪比的办法进行．利用折射微透镜阵列对入射红外辐射所具有的会聚作用，在维持器件原有暗电流水平不变的基础上，增大器件的填充系数进而提高器件的红外光电响应性能是有效的手段之一．本文给出了利用面阵石英折射微透镜来提高一种国产红外凝视焦平面成像器件的填充系数进而增大其信噪比的方法．折射微透镜的制作方法很多，离子束刻蚀是其中较为实用和可行的技术手段之一．在我们的实验中，与红外焦平面结构匹配的石英折射微透镜阵列的制备利用光刻热熔法及氩离子束刻蚀进行，所制石英折射微透镜分别为矩底拱面形和球冠形．实测表明，所制矩底拱面石英折射微透?更多还原

【Abstract】 A large area quartz glass refractive microlens array mounted on a large area focal plane detecting architecture was fabricated using a multiple process, including photolithography, heat treatment, and argon ion beam etching. The experimental measurements show that the optical filling factor of the focal plane dtectors with refractive microlens array is more than 95% (for square based arch microlens) and 70% (for spherical microlens), respectively, the focal length of the square based arch microlens and spherical microlens is about 90μm and 80μm, respectively. Both the scanning electron microscope and the surface style measurement were used to determine the dimensions and the surface morphology of the microlens fabricated. The techniques utilized can be applied to fabricate microlens array of larger area.更多还原