【摘要】 依据白光干涉理论，利用相移干涉法，研究了三维表面轮廓测量的原理与系统构成，讨论了白光相移干涉法测量三维表面轮廓的算法和数据处理的实现过程．实验结果表明，测量结果和数据处理都可精确地满足被测工件的要求．更多还原

【Abstract】 The prindples of measurement and instrument of a kind of profiler are studied accordingto the white-light-interfering method, and adopting the phase-shift interfering technique. The method and technique for measuring 3D surface profile with computer sampling and processing data with high speed is discussed, which is proved to be very effective by experiments.更多还原