【摘要】 用离子束辅助沉积技术在９Ｃｒ１８钢基体上形成了ＴｉＣｘＮｙ膜。ＴＥＭ观察膜呈多晶结构，具有（１１１）、（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实，ＴｉＣｘＮｙ膜呈含氧配置。膜的硬度与Ｎ含量有关，Ｎ的含量过高时硬度下降。在本实验条件下以离子注量为３ｘ１０１7／ｃｍ２时硬度最高，干摩擦表明膜的抗氧化性能优良，它的存在能有效抑制基体在摩擦过程中氧化皮的形成，显著改善基体的磨损特性，并能使基体由粘着磨损向磨粒磨损转化．更多还原

【Abstract】 The TiCxNy films were formed on 9Cr18 steel matrix using the ion beam assisteddeposition. The TEM analysis revealed the films with a polycrystalline structure with(111), (200) and (220) preferred orientation. The fact that TiCxNy films contain oxygencoordination was further confirmed by AES and XPS. Microhardness of the films wasfound dependent on its N content, and it was decreased for an excessively high Ncontent. An assisted dose of 3 X 1017/cm2 is optimum in this experiment. A dry frictiontest indicated that oxidation resistance of the films is excellent, and oxidation of thesteel matrix in the friction process can be obviously inhibited. Both the abrasive andadhesive wears of matrix are improved, and a trend of transformation from adhesiveinto abrasive wear appears for the steel matrix.更多还原