【摘要】 讨论直流电弧等离子体喷射化学气相沉积的金刚石膜其热导率和晶面取向间的关系，并介绍了利用Ｘ射线衍射图谱估算以（１１１）取向为主的三向系金刚石膜热导率的方法更多还原

【Abstract】 In this paper,the relation between crystal orientation and thermal conductivity of diamond film is discussed by DC arc plasma jet CVD.A method of evaluating thermal conductivity of diamond film is introduced by x-ray diffraction spectrum,and there are three kinds of crystal orientation in diamond film that is mainly (111) orientation.更多还原