【摘要】 采用高分辨金相显微镜对硬质合金刀片上沉积的CVD金刚石薄膜进行了表面形貌和膜/基横截面组织形貌的观察;并利用该显微镜配备的功能测量了金刚石颗粒大小、膜厚;利用显微镜正焦/过焦观察判断了金刚石薄膜的成膜状况。初步观察结果表明:甲烷浓度和基体钴含量对金刚石薄膜的表面形貌和膜/基横截面组织形貌有显著的影响更多还原

【Abstract】 The surface morphologies of chemical vapor deposited diamond thin films synthesized underdifferent deposition conditions and the cross - sectional morphologies between diamond films and substrateshave been observed using high resolution optical microscope. The grain size of diamond and the thickness ofdiamond film have also been measured by means of its accessories. The film state of coalescence has beenjudged using in - focus and out - of - focus observation method. The preliminary observation results show thatthe methane concentration and the cobalt content within cemented carbide insert have a significant effect onsurface and cross-sectional morphologies of diamond thin films deposited on cemented carbide inserts.更多还原