【摘要】 提出了表面粗糙度变波矢光散射测量方法，通过散射光强中心亮点光能量的对数ｌｎＥδ随ｋ２⊥变化的线性关系来确定粗糙度ｗ，对６块粗糙度不同的硅片背面样品进行了实验测量。更多还原

【Abstract】 Based on the linear relationship between the logarithm of the central peak energy and k 2 ⊥ in light scattering, a method for the measurement of surface roughne by changing the wave vectors is proposed. Experimental measurements of 6 samples of silicon backsides were conducted.更多还原