【摘要】 本文设计并研制了一套可控制抛光作用力的精密抛光装置，该装置具有抛光作用力微调功能及显示功能。用该装置对Ｚｅｒｏｄｕｒ陶瓷玻璃进行控制力抛光实验，稳定地获得了具有纳米级及亚纳米级表面粗糙度的超光滑表面，将该装置与机械化学抛光方法结合使用，可高效地加工出表面无损伤的超光滑基片。更多还原

【Abstract】 A new precision apparatus which the polishing force can be controlled has been designed and developed. The apparatus has equipped with micro adjustment and display function module to polishing force. Polishing experiments for Zerodur ceramic glass has been carried out in the equipment, supersmooth surface with roughness in the rang of nanometer and minornanometer has been producted steadlly. Supersmooth substrate with no damage surface can be highly efficiently machined when Chemical mechanical polishing method is combined with the controlled forced polishing apparatus.更多还原