【摘要】 在与小功率全Ａｒ－ＩＣＰ类似的条件下，使用顺序扫描等离子体光谱仪，用Ｓｔａｒｋ加宽法，选择Ｈβ（４８６．１ｎｍ）谱线，测定了空气－氩气混合气冷却ＩＣＰ中在感应线圈上０、２、５、１０ｍｍ处电子密度的侧向分布并将其中部分侧向分布经Ａｂｅｌ变换为径向分布。结果表明，空气－氩气混合气冷却ＩＣＰ中电子密度分布与全Ａｒ－ＩＣＰ相似，呈离轴峰；随着冷却气中空气含量的增加，离轴峰位置更靠近中心轴；当冷却气中含空气５％～１０％时，电子密度数值最大且大于全Ａｒ－ＩＣＰ中的数值。更多还原

【Abstract】 The lateral distribution of electron number density at 0、2、5、10 mm above the load coil in Ar air mixed coolant gas ICP was measured with Stark broadening method of H β line(486 1 nm) and some of the lateral distribution was converted into radial distribution by Abel inversion under the condition similar to that in the low power Ar ICP.The results show that the distribution of electron number in Ar air mixed coolant gas ICP is similar to that in Ar ICP and exhibit off axis maxima.When a lot of air was added to the coolant,the positions of the off axis maxima would near the axis.The electron number density reached maximum and was higher than that in Air ICP as 5% 10% air was added to the coolant.更多还原