【摘要】 本文采用ＳＥＭ、ＥＤＡＸ和ＴＥＭ等手段研究了多靶磁控溅射制备的Ｃｕ－ＴｉＮ复合薄膜，并测定了薄膜的电阻率。研究表明：复合薄膜的微结构随ＴｉＮ含量及基片温度发生明显变化，其电阻率在基片温度约为２００℃时取得极小值，约为室温沉积薄膜电阻率的１／４。更多还原

【Abstract】 Cu-TiN composite film was prepared by multitargets magnetron sputtering system.The microstructure of composite film was studied by SEM,EDAX and TEM,its resistivity was measured.The results show that the microstructure of composite film varies obviously with increase of substrate temperature and the resistivity of composite film reaches the minimum at substrate temperature about 200,which is about 1/4 of that of the film deposited at ambient temperature.更多还原