【摘要】 对直流电弧等离子体ＣＶＤ制备的金刚石薄膜的介电性能进行了研究，结果表明，金刚石薄膜的介电性能主要取决于样品的多晶性质以及表面和晶界处的非金刚石相和杂质成分更多还原

【Abstract】 Dielectric properties of diamond thin film prepared by dc arc plasma CVD have been studied.It indicates that the dielectric properties of diamond film depends mainly on its polycrystalline nature,and the presence of nondiamond phase and impurities on the surface and between diamond grains of the film.更多还原