【摘要】 用透射电镜对具有不同厚度元素层的Ag／Ni超晶格薄膜在加热过程的结构变化进行原位观察。原始态的超晶格薄膜都具有程度不同的由Ag／Ni失配界面引起的点阵应变；在较低温度下，点阵应变即开始出现弛豫。对原始态每个元素层包含5个原子面的样品，温度达250℃时，部分新晶粒开始形成并长大；直至约350℃，应变弛豫和晶粒长大的过程同时进行。温度再升高至400℃．部分晶粒迅速粗化。终使超晶格薄膜的层状周期结构在约450℃时完全被破坏。增加超晶格薄膜的元素层厚度，新晶粒形成和长大及随后粗化的温度相应地增高，同时晶粒的择优取向状态在热处理时也更稳定，表明超晶格薄膜结构的热稳定性得到了提高。热处理导致超晶格薄膜层状周期结构的被破坏，主要归因于晶粒的粗化现象，较低温时的新晶粒形成和晶粒长大对层状结构没有严重影响。更多还原

【Abstract】 The structural evolution Of Ag/Ni super-lattice films with different layer thicknesses during heating have been in-situ observed byTEM. All as deposited super-lattice films show lattice strains caused by Ag/Ni interfacial misfit in different extend. When beated, thestrains tend to be relexed. For the sample with 5 atomic planes in each layer, when temperature reaches 250℃, new grains are formedand grow among the matrix. The strain relexation and grain growth proceed simultaneously until about 350℃. At the temperature near400℃, a drastic grain coarsening occurs, and it completely destroy the layered Periodical structure of the film at shout 450℃. Increasingthe layer thiCkness, the temperatures for the formation of new grains, grain growth and coarsening get relatively higher, and the state ofgrains preferential orientation become more stable, it indicates the thermal stability of the structure of the film be enhanced. It is the graincoarsening which finally destroy the layered periodical structure of the film.更多还原