【摘要】 提出了一种适用于光电子集成ＣＭＯＳ－ＳＥＥＤ灵巧像素光互连网络的二维光纤束列阵结构和制作方法， 采用精密加工的光纤列阵定位槽和光学监控系统， 成功地研制出３２×２ 的单模和多模光纤列阵Ｉ／Ｏ接口器件， 光纤列阵层内及层间位移误差均小于２μｍ ， 角向差小于０．０２°。实验中， 已将二维光纤列阵Ｉ／Ｏ接口器件用于１６×１６ ＣＭＯＳ－ＳＥＥＤ灵巧像素光电子集成Ｃｒｏｓｓｂａｒ光互连模块中， 实验结果表明， 该光纤束列阵Ｉ／Ｏ接口器件完全满足光互连系统的高精度要求。更多还原

【Abstract】 A kind of constructure and fabrication method for two dimension fiber bundle arrays used in optical connection network with optoelectronic integrated CMOS SEED smart pixels are presented. High precision positioning box and the optical monitor system are used in this method. 32×2 single mode fiber bundle arrays and 32×2 mutli mode fiber bundle arrays are fabricated respectively. Displacing error of the fiber bundle arrays is less than 2μm and angular tilt error is less than 0.02 degree. The fabricated fiber bundle arrays have been used in 16×16 CMOS SEED smart pixel optoelectronic integrated Crossbar connection model and can meet the requirement for high precision.更多还原