【摘要】 采用离子轰击技术对钛基ｐＨ 电极进行表面处理，在其表面生成以δ相和ε相为主的组织结构．离子氮化后再引入微量氧可使渗层结构中有部分氧化钛，对ｐＨ 的响应好．经该工艺处理的钛基ｐＨ 电极与玻璃ｐＨ 电极测量ｐＨ 的结果一致，而且克服了玻璃ｐＨ电极容易破碎的缺点．采用本工艺可生产性能优良的ｐＨ 传感器更多还原

【Abstract】 When ion bombardment technique is applied for the surface treatment of the \{titanium\}\|base pH electrode, the structure with δ phase and ε phase as dominance will be formed on the surface. After ion nitridation and the introduction of micro amount of oxygen, part of Ti oxide can be formed in the osmotic layer structure, which has a good response to pH. The measurement result obtained by such Ti\|base pH electrode is coincident with that obtained by glass pH electrode which is easy to be broken. High quality pH sensor can be produced by applying this process.更多还原