【摘要】 对拉曼波谱测量金刚石薄膜内应力时存在的差异现象进行了分析。研究表明应力方向和晶体取向的未知，导致多晶金刚石薄膜中应力值与拉曼波谱位移量之间的比例系数难以准确选取，是造成计算出的内应力结果不一致的原因之一。更多还原

【Abstract】 The divagation of the internal stress in diamond films is analyzed .It’s found that due to the unknown directions of the stress and crystallographic axes , the proportional parameter to express the relationship between the stress and the shift of Raman spectrum is hard to obtain precisely , resulting in the divagation of the internal stresses which are calculated from the shift of Raman spectrum.更多还原