【摘要】 在扫描隧道显微镜轮廓测量过程中，探针自身的几何形状会混入测量结果中，从而造成相应的测量误差。本文提出了根据对标准样品的测量结果，反算出探针的几何形状的算法，并应用于实测图像求解出探针的几何形状。在求得探针的几何形状后，文中推导了去除探针几何形状造成的误差，对扫描隧道显微镜图像进行重建的算法，并对实测样品进行了处理。结果表明上述算法可有效地减小探针自身形状造成的测量误差。更多还原

【Abstract】 For the accurate measurement of the mesoscopically rough surfaces by scanning tunneling microscopy, the distortion caused by the tip profile must be eliminated. The tip profile must be determined for this purpose. In this paper, a new technique for determining the STM tip profile is presented employing a STM calibration grating whose structure is known. The 2 D tip profile is obtained by this method. After the tip profile is determined, the STM image of Au film on SiO 2 wafer is reconstructed using a simple and straightforward formalism.更多还原