【摘要】 本文用多层薄膜理论的费涅耳系数矩阵法导出光子扫描隧道显微镜（ＰＳＴＭ）探测场计算公式，公式适用于四层介质三界面和三层介质两界面两种模式。用所得公式研究了等强度扫描下表面形貌测量时由样品表面起伏引起附加的假象用π对称双激光器照射样品方法减小假象。通过数值模拟给出了在不同入射角、偏振和不同探针至样品距离条件下减小假象的效果。上述方法亦适用于ＰＳＴＭ测量样品折射率图像时减小由表面倾角引入的假象。更多还原

【Abstract】 Using the fresnel coefficient matrix method of the multilayer thinfilm theory,we have introduced a set of formulae of the PSTM detected field in two modes:four layer three interface and three layer two interface.With these formulae,we have studied the sample surface inclination pseudo image and elimination method with π symmetrical double laser illuminating.Numerical results have shown the effect of the eliminating pseudo image with the different incident angles,polarizations and tip sample distance.In the case of the measuring refractive index of the sample,the methods are useful for eliminating inclination pseudo image.更多还原