【摘要】 采用氩离子束刻蚀制作与一种１２８×１２８元ＰｔＳｉＩＲＣＣＤ摄像芯片匹配的单片硅折射微透镜阵列．所制成的微小光学阵列元件的填充系数高于９５％，每单元硅折射微透镜为矩底拱面形，其近轴光（３～５μｍ光谱波段）的焦距约为８０μｍ，给出了硅折射微透镜阵列的表面探针和扫描电子显微镜测试结果更多还原

【Abstract】 The Silicon refractive microlens arrays coupled with a large area PtSi IRCCD of 128×128 is fabricated by photolithographys and Ar ion beam etching.The filling factor of the micro optics components fabricated is more than 95%.The focal length of the rectangular arch microlens is about 80μm.The microstructure of the Si microlens arrays is analyzed by the scanning electron microscope and the surface style measurement.更多还原