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用脉冲激光淀积制备具有光滑表面的A-轴取向YBa2Cu3O7薄膜
FABRICATION OF A AXIS ORIENTED YBa 2Cu 3O 7 THIN FILMS WITH SMOOTH SURFACE BY PULSED LASER DEPOSITION
【摘要】 我们采用脉冲激光淀积方法在(100)SrTiO3基底上制备了a轴取向外延的YBa2Cu3O7-x薄膜.通过采用活性氧,降低氧压和淀积速率,制备出了Tc超过80K、表面平均粗糙度为4.43nm的薄膜.X射线衍射谱表明,实验得到的YBa2Cu3O7-x外延薄膜是高度A轴取向的
【Abstract】 Abstract We have grown a axis oriented YBa 2Cu 3O 7- x films on (001) SrTiO 3 substrates by pulsed laser deposition. X ray diffraction spectroscopy shows that highly a axis oriented YBa 2Cu 3O 7- x films,with T c 0 above 82K, can grow under suitable conditions. Using active oxygen,lowering oxygen pressure and deposition rate can lead to the decrease of surface roughness. The mean surface roughness of the film is 4.4nm.
- 【文献出处】 低温物理学报 ,CHINESE JOURNAL OF LOW TEMPERATURE PHYSICS , 编辑部邮箱 ,1999年04期
- 【分类号】O484
- 【下载频次】31