【摘要】 影响直接外延生长氧化物薄膜的因素有很多，最主要的是保证氧化物薄膜的正确成相和在单晶衬底上成核．直接外延生长时，衬底温度影响到薄膜的成相．衬底温度还影响薄膜的生长动力学，并因此影响薄膜的外延生长取向．由于薄膜是首先在衬底表面成核、成相并生长的，因此衬底材料晶格的影响是不容忽视的．衬底材料（或异质外延材料）与薄膜的相互作用是影响外延生长的最直接因素，而晶格常数失配会造成薄膜样品中存在应力并影响样品性质．利用脉冲激光淀积法，我们成功地外延生长了ＹＢａ２Ｃｕ３Ｏ７超导薄膜、Ｓｒ０．５Ｂａ０．５ＴｉＯ３铁电介电薄膜、Ｌａ０．７Ｃａ０．３ＭｎＯ３铁磁巨磁电阻薄膜、Ｌａ０．５Ｓｒ０．５ＣｏＯ３导电薄膜等多种具有钙钛矿结构的氧化物功能薄膜．以这些钙钛矿结构氧化物薄膜的外延生长为例，本文讨论影响氧化物薄膜异质外延生长的因素更多还原

【Abstract】 Abstract Based on the achievement of epitaxial growth in several Perovskite oxide films, such as superconducting YBa 2Cu 3O 7, dielectric Sr 0.5 Ba 0.5 TiO 3, colossal magneto resistance La 0.7 Ca 0.3 MnO 3 and conductive La 0.5 Sr 0.5 CoO 3 thin film we discuss the influences of substrate temperature ( T s ) and substrate material in the epitaxial growth of oxide thin films. The most important thing is phase formation and nucleation on a single substrate surface. T s has influences on phase formation and growth dynamics. Bacause the nucleation hapends on a substrate surface, the effects of lattice mismarch and interaction should be consideration.更多还原