【摘要】 我们设计和研究了用于测量超导薄膜穿透深度的双线圈互感装置，用数值模拟的方法对线圈及其位形进行了优化．对磁控溅射制备的不同厚度的铌膜在不同温度下的测量结果表明，我们的设计大大提高了实验的准确性和稳定性，并得到了理论预期的随膜厚和温度的变化关系更多还原

【Abstract】 Abstract The two coil mutual inductance technique for measuring the penetration depth λ of superconducting films is studied. The distances between the film and the drive coil and receive coil are kept as small as possible, and the drive coil is optimized via numerical simulation. The measurements on magnetron sputtered Nb films with thickness ranging from 10nm to 90nm at different temperatures have shown that the apparatus has high accuracy and stability. The results for the films with thickness larger than 35 nm show the thickness and temperature dependencies of λ that are expected from the theoretical predictions.更多还原