【摘要】 利用激光分子束外延法在高约２５０ｎｍ的ＳＴＯ台阶衬底和３６．８°双晶衬底上外延厚度为２００～２３０ｎｍ的ＹＢＣＯ超导薄膜，用常规的光刻工艺制出ＤＣＳＱＵＩＤ图形．器件进入超导态后，正常态电阻不随温度改变．在恒定偏流，７７Ｋ温度下，磁通白噪声为２．０×１０－４Φ０／Ｈｚ．经过４０次室温与液氮温度间循环后，观察不到任何性能的改变更多还原

【Abstract】 Abstract We fabricated high stable YBCO junctions and DC SQUIDs with Laser Molecular Beam Epitaxial (L MBE) growth. The thickness of superconducting YBCO films on 2500 step and 36.8° Bi crystal substrates are 2000～2300. The SQUID patterns are defined by standard photolithography. In superconducting state, the normal resistance of junctions is temperature independent. The white noise measured at 77K is 2.0×10 -4 Φ 0/Hz with proper constant current bias. The change of the junction characteristics after 40 times cycling between liquid nitrogen and room temperature is invisibly small.更多还原