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YBCO大面积超导薄膜沉积工艺与微结构研究
MANUFACTURING TECHNOLOGY AND MICROSTRUCTURAL STUDY OF LARGE AREA YBCO SUPERCONDUCTING FILM
【摘要】 采用中空柱状阴极直流磁控溅射方法制备了大面积YBCO 超导薄膜.应用XRD 方法,对在30 ×30mm2LaAlO3 衬底上沉积的YBCO 薄膜进行了结晶完整性、均匀性的测定.对同一样品,使用透射电子显微镜对薄膜和衬底间的界面进行了研究.
【Abstract】 Large area YBCO superconducting films are prepared by using hollow cylindrical cathode, dc magnetically controlled sputtering assembly. XRD is used to investigate the perfection and the homogeneity of the crystallized YBCO film which is of 30×30mm\+2 upon LaAlO\-3 substrate. For the same specimen, TEM is used to study the film /substrate interface.
【基金】 国家超导研究与开发中心资助
- 【文献出处】 低温物理学报 ,CHINESE JOURNAL OF LOW TEMPERATURE PHYSICS , 编辑部邮箱 ,1999年06期
- 【分类号】O511;O484.1
- 【被引频次】1
- 【下载频次】85