【摘要】 用醋酸锶（Sr（Ac）2）、醋酸钡（Ba（Ac）2）和钛酸四丁酯（TBT）为原材料，采用sol－gel工艺制备Ba1－xSrxTiO3系铁电薄膜研究了螯合剂乙酸丙酮（HAcAc）的添加对金属有机前驱体的热演化特性及薄膜微结构的影响提出控制薄膜微结构的有效途径，讨论了HACAC对薄膜微结构的调制机理更多还原

【Abstract】 The Ba1-xSrxTiO3 thin films were prepared by a sol-gel method using barium acetate (Ba(Ac)2). strontium acetate (Sr(Ac)2)and titanium-tetrabutoxide (TBT) as starting materials. Acetic acid and 2-methoxyethanol were selected as solvents separately. The efFects of addition of acetylacetone (HAcAc) on the characteristics of pyrolysis evolution and microstructures of thin films were investigated.The results showed that the addition of HAcAc changes the properties of inorganic intermediate-phases which transform into perovskite phase. Under the same heat treatment conditions, the grain size of the thin films modified by HAcAc is about 100urn, which is larger than that of the films without modification of HAcAc.更多还原