【摘要】 采用水相ｓｏｌｇｅｌ 法制备了ＴｉＯ２ 薄膜， 以ＴＧ、ＤＴＡ、ＦＴＩＲ、ＸＲＤ和ＳＥＭ 等方法研究了成膜过程中薄膜的结构变化．经３５０～４５０℃处理的薄膜为锐钛矿相结构，［２０４］ 择优取向．经一次旋涂所得的薄膜在１５０℃处理１ ｈ 后， 厚度为５０ ｎｍ ；在循环伏安特性测试中， 其注入／抽出电荷容量分别为４．７８ 、２ ．５２ ｍＣ／ｃｍ２．薄膜表现出较弱的阴极着色效应， 可望在电色器件中用作对电极层．更多还原

【Abstract】 TiO 2 thin films were deposited on ITO coated glass substrates by the spin coating technique using Ti(OBu n ) 4 and H 2 O 2 as precursors. The structural evolution during the deposition process from gel to thin films were investigated by TG, DTA, FTIR, XRD and SEM. The XRD results showed that the films annealed at 350～450℃ are [204] preferentially oriented. When cycling is between -1.5～+0.5V vs SCE and the scan rate is 20mV/s, intercalation and deintercalation charge density for the 150℃ annealed TiO 2 thin film during a voltammetric cycle in 1mol/L LiClO 4 /PC electrolyte are 4.78, 2.52 mC/cm 2 respectively. The film shows weak cathodic coloration and may be used as a counterelectrode in an electrochromic device.更多还原