薄膜厚度对NiO/NiFe/Cu/NiFe自旋阀多层膜的磁阻效应的影响

【摘要】 用射频磁控溅射方法制备多层膜，研究了双层膜NiO／NiFe的矫顽力Hc和交换耦合场Hex与反铁磁层NiO、铁磁层NiFe厚度的关系。结果表明：NiO厚度为70nm时，Hex最大；Hc随NiO厚度增大而增大。当NiFe厚度增加时，Hex近似线性减小；而矫顽力则随NiFe厚度增大开始有缓慢增加，然后才减小。对于NiO（70nm）／NiFe（t1nm）／Cu（2．2nm）／NiFe（t2nm）自旋阀多层膜材料，研究了NiFe膜厚度对磁阻效应的影响。结果表明：被钉扎层NiFe的厚度为3nm时，自由层NiFe的厚度为5nm时，MR值分别最大，约为1．6％。更多还原

【Abstract】 We successfully fabricated spin - valve multi - layers by RF magnetronsputtering, and strdied the influence of thickness of anifermagntic latyer NiO andferromagnetic laye NiFe on Hc and Hex of Nio/NiFe doube layer. The result showed that thebiggest Hex was obtained when the thickness of NiO laye is 70nm and Hc was increasing asAnckness of NiO was increasing. When the thickness of NiFe wes increasing, Hex wasapproximately decreasing lineally, but Hc was sfowly increing at the beginning, thendecreasing.We also studied the influence of thickness of NiFe laye on MR effeCt of NiO(70nm)/NiFe(t1 nm)/Cu(2.2nm)/NiFe(tz nm)multilarers. The resrlt showed tha the maximumMR value 1.6% was edned separatel at the thickness of pinned layer NiFe 3 nm or freelaye NiFe 5nm.更多还原