【摘要】 采用离子注入技术将铅离子注入到ITO薄膜玻璃中,用分光光度计、四探针测试仪、硬度计等测定了ITO膜注入前后的光学性能、电学性能、机械性能和化学德定性。结果表明注入后光学、电学性能有所下降,而机械性能和化学稳定性有明显提高。这说明离子注入提高了ITO薄膜玻璃的耐磨损性和在有腐蚀性气氛下的稳定性。更多还原

【Abstract】 In this study, Pb~+ ions were injected into the ITO film on glass by ion-implantation technology. Using spectrophotometer, four-probe, hardometer and other instruments, the optical, electrical, mechanical properties and durability were measured before and after implantation. The results show that the optical and electrical properties are degraded slightly, but the hardness and durability are improved obriously after implantation. These indicate that Pb~+ ion-implantation can improve the resistance to abrasion and durability of ITO film in corrosive attnosphere.更多还原