【摘要】 本文介绍了用射频溅射法制备的Ni膜热敏电阻的特性及相应工艺条件。通过X射线衍射法分析了不同偏压下Ni膜的晶粒尺寸,并对实验结果进行了分析,获得了能够长期稳定工作的电阻温度系数(TCR)较高的热敏电阻。更多还原

【Abstract】 This paper describes the properties of Ni thin film thermal resistor by RF sputtering and the corresponding processing conditions. X-ray shows the sizes of crystal grain in Ni thin films with different DC bias. The experiment data is analyzed, and the thermal resistor with high TCR and long term stability is obtained.更多还原