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陶瓷压阻式压力传感器的研制

Study of Ceramic Piezoresistive Pressure Transducer

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【作者】 郭益平石汝军翟鹏郑丽娟

【Author】 Guo Yiping Shi Rujun Zai Peng Zheng Lijuan (Shangdong Institute of Ceramic Research & Design ,Zibo 255086)

【机构】 山东省硅酸盐研究设计院!淄博255086

【摘要】 介绍了一种采用陶瓷基座、陶瓷膜片制备的压力传感器。它以陶瓷膜片为受载弹性体,利用厚膜电阻的压阻效应,以厚膜工艺技术制得性能优良,价格低廉的陶瓷压阻式压力传感器。使压力传感器的应用范围进一步拓宽。

【Abstract】 A Ceramic piezoresistive pressure transducer and a method for making it are disclosed. Four thick film resistors are screen-printed onto a deformable ceramic diaphragm ,after which they are preferably fired. And then the diaphragm is mounted to a ceramic base plate ,the resistors are connected to circuitry for measuring changes in their respective resistances due to deformation of the diaphragm by an external fluid pressure to be measured.

  • 【文献出处】 传感器技术 ,Journal of Transducer Technology , 编辑部邮箱 ,1999年06期
  • 【分类号】TP212
  • 【被引频次】12
  • 【下载频次】482
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