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陶瓷压阻式压力传感器的研制
Study of Ceramic Piezoresistive Pressure Transducer
【摘要】 介绍了一种采用陶瓷基座、陶瓷膜片制备的压力传感器。它以陶瓷膜片为受载弹性体,利用厚膜电阻的压阻效应,以厚膜工艺技术制得性能优良,价格低廉的陶瓷压阻式压力传感器。使压力传感器的应用范围进一步拓宽。
【Abstract】 A Ceramic piezoresistive pressure transducer and a method for making it are disclosed. Four thick film resistors are screen-printed onto a deformable ceramic diaphragm ,after which they are preferably fired. And then the diaphragm is mounted to a ceramic base plate ,the resistors are connected to circuitry for measuring changes in their respective resistances due to deformation of the diaphragm by an external fluid pressure to be measured.
【关键词】 压力传感器;
陶瓷;
厚膜电阻;
压阻效应;
【Key words】 Pressure transducer Ceramics Thick film resistors Piezoresistive effect;
【Key words】 Pressure transducer Ceramics Thick film resistors Piezoresistive effect;
- 【文献出处】 传感器技术 ,Journal of Transducer Technology , 编辑部邮箱 ,1999年06期
- 【分类号】TP212
- 【被引频次】12
- 【下载频次】482