【摘要】 利用射频溅射在硅衬底上制作 Ｐｔ膜电极，以溶胶－凝胶法制作的低阻 ＳｎＯ２为敏感层制成平面热线式气敏元件．研究了工艺条件、掺杂行为及其对气敏特性的影响．掺Ｓｂ（３％ ａｔｍ）及 Ｐｔ石棉（２％ ｗｔ）在 ７００℃烧结 １． ５ ｈ的元件对 Ｈ２、ＮＨ３灵敏度较高。更多还原

【Abstract】 Pt film electrodes on Si substrate were formed by RF sputtering, then planar heat-wire type sensors were fabricated with low resistance SnO2 powder prepared by solgel method. The influence of technologic conditions and doping on gas-sensitive characteristic has been studied. Senors based--SnO2 doped Sb (3 % atm), Pt asbestos 2 % wt and sintered at 700 ℃ for 1. 5 h were sensitive to H2. NH3 gases.更多还原