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铁电存储器及其疲劳机制的研究

Ferroelectric Memory and Research on its Fatigue Mechanism

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【作者】 张宁欣桂治轮李龙土

【Author】 Zhang ningxin Gui zhilun Li longtu (Department of Material Science and Engineering, Tsinghua University, Beijing 100084)

【机构】 清华大学材料科学与工程系

【摘要】 简述了铁电材料的结构及其性能,比较了铁电存储器的各种制备工艺的优缺点及发展前景;同时介绍了目前较为先进的铁电储存器的优良的读、写等特性及国际市场发展动态对当今高度发展的信息社会的重要作用。同时探讨了铁电材料的疲劳机制研究现状及其深入研究所应遵循的技术路线。

【Abstract】 The structure and characteristics of ferroelectric materials are stated and the comparison of different processes for manufacturing ferroelectric thin films is discussed. Also the popular ferroelectric random access memory currently with excellent characteristics of fast reading and writing speed, small size and long term endurance is depicted according to its importance to modern information society. In the end the electric fatigue of ferroelectric materials and devices are explored and the potential research method for electric fatigue is suggested.

【基金】 国家“863”计划重点课题
  • 【分类号】TP333,TM221
  • 【被引频次】2
  • 【下载频次】166
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