【摘要】 提出了金属-半导体欧姆接触退化的快速评估方法-温度斜坡快速评价法，并建立了自动评估系统，用该方法和系统测得的欧姆接触退化激活能，和传统方法相比，耗时少，所需样品少，所得结果和传统方法一致．同时，针对传统AuGeNi／Au欧姆接触系统的缺点，提出了加TiN扩散阻挡层的新型欧姆接触系统．实验表明，新型欧姆接触系统的可靠性远远优于传统AuGeNi／Au欧姆接触系统．更多还原

【Abstract】 A rapid evaluation method, temperature ramp method, for GaAs MPFETsohmic contacts is proposed, and an automatic evaluation system is developed. Throughthis method and system, the activation energy for ohmic contacts degradation can beobtained at shorter time and less sample-cost compared with the traditional method, andthe results are in agreement with those obtained by traditional methods. In accordancewith the drawbacks of traditional AuGeNi/Au ohmic contacts, a new ohmic contactssystem with TiN diffusion banter layer is proposed. Experiment results show that thereliability of ohmic contacts with TiN are greatly superior to that of traditionalAuGeNi/Au ohmic contacts.更多还原