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相平衡形成母液法生长碲镉汞液相外延膜
LPE of Mercury Cadmium Telluride by Equilibrium Formation of Solution
【摘要】 根据相律探索出相平衡形成母液法生长碲镉汞液相外延膜新的工艺方法。该方法工艺简单,外延膜组份易于调整和控制。利用此种方法,成功地生长出x = 0-21 ~0-23,表面光亮,结构完整的碲镉汞液相外延膜。
【Abstract】 According to the equilibrium rule we developed a new method by which mercury cadmium telluride epilayers with x=0 21~0 23 have been grown This simple method make it easy to control epilayer composition. The as grown epilayer have a bright surface and a good crystal quality.
- 【文献出处】 半导体杂志 , 编辑部邮箱 ,1999年04期
- 【分类号】TN304.055
- 【被引频次】3
- 【下载频次】63