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硫化压力对FeS₂薄膜结构和光学性能的影响

Influence on Structure and Optical Property of Pyrite（FeS₂） Thin Films by Sulfur Pressure

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【Author】 Xu Wenlei, Meng Liang, Liu Maosen(Department of Materials Science and Engineering, Zhejiang University, Hangzhou\ 310027)Received 5 June 1998, revised manuscript received 9 September 1998

【机构】浙江大学材料科学与工程学系!杭州310027；

【摘要】通过磁控溅射法制备纯Ｆｅ膜，再在Ｓ气氛中用热硫化法使其转变成为多晶ＦｅＳ２薄膜，硫化压力分别为４０、６０、８０和１００ｋＰａ，并研究了硫化压力对ＦｅＳ２薄膜的结构和光学性能的影响．研究发现，在８０ｋＰａ条件下，结晶状况达到最佳，光吸收系数较高，禁带宽度可达到０．９ｅＶ．更多还原

【Abstract】 Iron thin films prepared by magnetron sputtering on glass substrates have been annealed at 400℃ in different sulfur atmosphere ranging from 40 to 100kPa for 20h.We study the influence of sulfur atmosphere on structure and optical property.It is found that the structure and optical property of pyrite films are optimized at 80kPa,its band gap is about 0\^9eV. PACC:7280G, 8115, 6110, 7865更多还原