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SnO₂薄膜的湿敏效应

Study of Humid Sensitivity of SnO₂ Film Prepared by Spray Pyrolysis

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【Author】 Zhang Jinwen (Institute of Microelectronics,Beijing University,Beijing 100871) Wu Guangming (Division of Fundamental Courses,Beijing Institute of Petrolic and Chemical Technology,Beijing 102600) Song Shigeng,Tao Mingde (Xinjiang Institute of Physics,

【机构】北京大学微电子学研究所!北京100871；北京石油化工学院基础部!北京102600；中国科学院新疆物理所!乌鲁木齐830011；

【摘要】报道了用喷雾热分解法在不同温度下制备二氧化锡薄膜，发现其在３２５℃时已晶化，得到四方相多晶ＳｎＯ２。这种薄膜具有明显湿敏效应。测量表明，较高湿度区阻值随湿度变化近似线性，从高湿到低湿平均为每上升１％ＲＨ，阻值下降８．８Ω，响应速度小于１分钟，阻值恢复较容易更多还原

【Abstract】 Using spray pyrolysis we prepared SnO 2 thin film successfully on glass deposited at various temperatures.Results show at depositing temperature of 325℃ the SnO 2 thin film is crystallized.In high humidity area,its relation of impedance and humi dity is approximately linear.With increasing of every 1%RH,the impedance decrease 8 8Ω.Response velocity is less than 1min.And its recovery of impedance is easy.更多还原