【摘要】 ＳｉＯ２ 光波导、重掺杂光波导、ＳＯＩ光波导、合金光波导及聚合物光波导等低损耗硅基光波导的研究已取得了很大的进展，随着这些波导的硅基光开关不断研制出来，各种光开关结构也不断提出来了。为了解决硅的线性电光系数为零的问题，采用了多种方法，以获得强的线性电光效应，实现高速光开关。文章回顾了近十年来硅基光波导及光开关的研究进展。更多还原

【Abstract】 Great progresses have been made for silicon-based optical waveguides and switches in the late decade.The main results are reviewed in the paper,including the structure of various kinds of waveguides and switches.Optical switches based on electro-optic effects are also discussed.更多还原