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FTIR测量及双调制和步进扫描技术的应用
Double modulation and step scan technique applications in FTIR spectrum measurements
【摘要】 介绍了傅里叶变换红外( F T I R) 测量及双调制和步进扫描技术的基本原理,讨论了中红外波段半导体材料和器件光谱研究中的一些特殊要求以及在 F T I R 方法中引入双调制和步进扫描技术的必要性,并结合一些具体应用实例探讨了这些技术的适用范围。
【Abstract】 The Fourier transform infrared (FTIR) spectroscopy, as well as double modulation and step scan techniques, are described. Some special demands in the spectroscopy research of mid-infrared band semiconductor materials and devices by using FTIR are discussed. The applications of double modulation and step scan techniques in this field and their flexibility are also discussed.
【关键词】 光谱测量;
傅里叶变换红外;
双调制;
步进扫描;
【Key words】 spectrum measurement; FTIR; double modulation; step scan;
【Key words】 spectrum measurement; FTIR; double modulation; step scan;
- 【文献出处】 半导体光电 ,SEMICONDUCTOR OPTOELECTRONICS , 编辑部邮箱 ,1999年04期
- 【分类号】TN219
- 【被引频次】6
- 【下载频次】147