【摘要】 相移莫尔轮廓测量法是一种光学全场非接触三维测量方法，由于存在机械运动，限制了测量速度、使用寿命及测量的可靠性。采用变光源阴影莫尔测量技术，实现了无机械运动的快速测量。该测量方法可以满足 Ｂ Ｇ Ａ（ 球脚阵列） 封装引脚尺寸的实时在线检测的需要更多还原

【Abstract】 Shadow moire profilometry is a full field non-contact 3-D measurement method. Generally there exists mechanic motion which would limit the speed,life time and reliability of the measurement.A fast measurement method without mechanic motion is realized in this paper by using the technique of changeable light source.This method meets the needs of the on-line test of BGA coplanarity.更多还原