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碳化锆包覆层的流化床-化学气相沉积制备工艺研究
Preparation of zirconium carbide coating by fluidized-bed chemical vapor deposition
【作者】 程心雨; 刘泽兵; 刘荣正; 刘马林; 杨旭; 刘兵; 邵友林;
【Author】 CHENG Xin-yu;LIU Ze-bing;LIU Rong-zheng;LIU Ma-lin;YANG Xu;LIU Bing;SHAO You-lin;Institute of Nuclear and New Energy Technology,Tsinghua University;
【机构】 清华大学核能与新能源技术研究院;
【摘要】 超高温气冷堆(VHTR)具有安全性好、用途广泛的特点,是第四代核能系统的重要反应堆堆型。由于VHTR要求冷却剂出口温度高于950℃,核燃料需要在更高的温度下工作,碳化锆(ZrC)具有阻挡裂变产物扩散的优异性能、良好的热稳定性和较低的中子吸收截面,是未来TRISO包覆燃料颗粒中包覆层的重要候选材料。在ZrCl4-C3H6-Ar-H2体系中进行流化床化学气相沉积(FB-CVD)试验,在不同沉积温度1300~1550℃下制备出ZrC包覆层,并研究了沉积温度对ZrC包覆层微观形貌和组分的影响。对所制备的ZrC包覆层进行了X射线衍射(XRD)、扫描电子显微镜(SEM)、拉曼分析(Raman)和能量色散谱仪(EDS)等分析测试。结果表明,本研究制备的ZrC包覆层结构致密,整体为ZrC物相,包覆层的碳含量与沉积温度有关。对所制备的包覆层在2200℃高温处理1h,可以实现ZrC包覆层相组成的纯化。
【Abstract】 Very-high temperature gas-cooled reactor(VHTR) is an important reactor type for the fourth-generation nuclear system due to its good safety and versatility.Since VHTR requires coolant outlet temperature higher than 950℃,nuclear fuel needs to work at higher temperatures,and zirconium carbide(ZrC) is an important candidate coating material for future TRISO particles due to its excellent properties.Fluidized bed chemical vapor deposition(FB-CVD) was performed in the ZrCl4-C3 H6-Ar-H2 system,and ZrC coatings were prepared at 1300~1550℃.The effects of deposition temperature on the microscopic morphology and composition of ZrC coatings were investigated.The prepared ZrC coatings were analyzed by XRD,SEM,EDS and Raman analysis.The results show that the ZrC coating prepared in this study has a dense structure with an overall ZrC phase, and the carbon content of the coating is related to the deposition temperature.The prepared coatings were heat-treated at 2200℃ for 1 hour to achieve the phase purification of ZrC coating.
【Key words】 Very-high-temperature gas-cooled reactor; Zirconium carbide; TRISO particles; Fluidized bed chemical vapor deposition;
- 【会议录名称】 中国核科学技术进展报告(第八卷) 中国核学会2023年学术年会论文集 第3册 核材料 核化学与放射化学 锕系物理与化学
- 【会议名称】中国核学会2023年学术年会
- 【会议时间】2023-10-17
- 【会议地点】中国陕西西安
- 【分类号】TL424;TL352
- 【主办单位】中国核学会