【作者】 黄银山； 周亮； 张成瑞； 毛军发；

【Author】 Yinshan Huang;Liang Zhou;Chengrui Zhang;Junfa Mao;Shanghai Jiao Tong University;

【机构】 上海交通大学；

【摘要】 本文介绍了一种采用硅基MEMS光敏复合薄膜多层布线工艺实现的W波段1T2R异构相控阵雷达收发前端。雷达收发前端采用本振路径移相架构,异质异构集成了Si Ge收发芯片,Ga As功率分配器和6 bit移相器芯片,Ga N功率放大芯片以及协同设计的硅基嵌入式天线。本文还介绍了硅基嵌入式天线的设计方法,获得了9.8dBi的增益,通过RDL可实现天线与其他芯片的直接互连且获得了低损耗,大幅缩小了系统的尺寸。W波段雷达最高输出功率可达31dBm,3 dB功率带宽7 GHz。该相控阵雷达收发前端可应用于多维目标探测和生命体征监测等领域。更多还原

【Abstract】 This paper presents a W-band 1T2R Phased-array heterogeneously integrated based on MEMS photosensitive composite film multilayer wiring process of Silicon-based. Two 6bit phase shifter of radar transceiver are located at LO ports of SiGe-based transceiver chips,two GaN-based power amplifiers and a GaAs-based power divider and silicon embedded antennas(SEA) are high density integrated in a silicon wafer. The co-designed SEA is interconnected to other chips through via at RDL, which reduces the system size and interconnection loss. The SEA was individually fabricated and measured where the measured maximum gain is 9.8 dB. The radar measured maximum output power is 31 dBm with 3dB bandwidth of 7 GHz. The proposed radar can be used in multidimensional target detection, long-range vital sign monitoring in the future.更多还原