【作者】 丛炳俊； 王菊； 王慷慨； 刘涌； 韩高荣； 宋晨路；

【Author】 Cong Bingjun;Wang Ju;Wang Kangkai;Liu Yong;Han Gaorong;Song Chenlu;State Key Laboratory for Silicon Materials,Department of Materials Science and Engineering,Zhejiang University;

【机构】 浙江大学硅材料国家重点实验室材料科学与工程学系；

【摘要】 采用溶胶-凝胶法,在石英基板衬底上采用多次旋涂的方式制备锐钛矿相柱状晶结构的TiO₂薄膜,并研究了溶胶浓度、陈化时间和退火温度对结晶性的影响。利用扫描电子显微镜（SEM）观察薄膜的微观形貌,利用X射线衍射分析（XRD）并结合谢乐公式来计算晶粒尺寸,并对样品的光催化性和亲水性进行分析。结果表明:溶胶浓度在小于1.5M时,退火温度在400～550℃,陈化时间在3天内可以制备出锐钛矿相柱状晶薄膜,薄膜单层可以达到30nm远远高于文献中报道值。当样品的柱状晶形貌较好时,相应的薄膜光催化性能和亲水性能都比较优越。更多还原

【Abstract】 A facile way to prepare anatase TiO₂ films on quartz glass has been investigated using sol-gel spin-coating method.The micro-morphology of the film was characterized by scanning electron microscopy,the grain size of TiO₂ was estimated by X-ray diffraction combined with Scherrer formula.The results showed that the columnar grains could be obtained only when all the following 3 conditions were met:ⅰ) concentration of the sol <1.5 M,ⅱ) aging time <3 days,ⅲ)annealing temperature is in the range of 400℃～550℃.And the single thickness of the TiO₂ films reaches 30 nm,which is far larger than the reported value in the literature.Furthermore,to gain a better understanding of the effects of columnar grains,the dependencies of photoelectric properties on the columnar grains has also been studied,that is,the larger the grain size is,the better the photocatalysis and hydrophilic properties will appear.更多还原