【作者】 张东阁； 傅雨田；

【Author】 Zhang Dongge;Fu Yutian;Key Laboratory of Infrared System Detection and Imaging Technology,Chinese Academy of Sciences;Shanghai Institute of TechnicalPhysics,Chinese Academy of Sciences;

【机构】 中国科学院红外探测与成像技术重点实验室； 中国科学院上海技术物理研究所；

【摘要】 针对1.2m离轴非球面反射镜的面型检测需求,设计了CGH零位补偿检测光路,用于透镜零位补偿检测的对比验证。首先在虚拟玻璃模型中,完成了计算全息相位的优化设计,代入零位补偿光路进行复核。设计了CGH补偿器的辅助全息,用于标记CGH位置和母镜顶点。最后用相位量化和编码程序完成了CGH掩膜版制图,同时对CGH补偿器衍射级次分离和公差分配等问题进行了仿真和建模,确定了CGH补偿器的公差容限。CGH补偿器可以实现较高的面型检测精度,以一种独立的方法验证被测面型的准确性。更多还原

【Abstract】 Computer generated hologram null lens were prepared for 1.2 m off axis aspherical mirror testing,while the classical null lens testing results were compared for confirmation.The phase function of CGH was optimized by virtual glass model in the optical design software,and then it was introduced in the null test optical path to verify.The alignment CGH was considered at the same time,and it was adopted for alignment and monitoring.The CGH mask was plot based on the custom program which was used for phase quantization and coding.The depression of various diffraction orders was discussed in the following,and the tolerance of the CGH was assigned by the corresponding model.As a different testing method,CGH null test could achieve a high accuracy for cross validation.更多还原