【作者】 王景玺； 刘佳乐； 赵鑫洋； 于民；

【Author】 WANG Jing-xi;LIU Jia-le;ZHAO Xin-yang;YU Min;Institute of Microelectronics,School of information science and technology,Peking University;

【机构】 北京大学信息科学技术学院微纳电子研究院；

【摘要】 辐射探测器的能量分辨率是一个十分重要的性能参数,利用先进的微电子、微机械加工技术研制了从40～1000μm不同厚度、不同面积的离子注入型硅PIN辐射探测器,并进行漏电流、噪声水平、能量分辨率等指标的测试。结果表明,随着探测器面积的增加,能量分辨和噪声也随之上升;超薄探测器的噪声和能量分辨值较大,而非超薄结构的探测器,能量和噪声值较小。此外,还研究了死层厚度对于能量分辨率的影响,发现通过减薄死层可以有效减小能量分辨值,提高能量分辨本领。更多还原

【Abstract】 The energy resolution of the radiation detector is a critical parameter,we use advanced microelectronics,micromachining technology fabricated different thickness and different area of the ion-implanted PIN radiation detector from 40μm to 1000 μm.After that we test the leakage current,noise level,energy resolution and some other indicators.The results show that the energy resolution and noise increase with the increase of detector area.The noise and energy resolution of the ultra-thin detector are higher than those of the non-ultra-thin structure detector.In addition,we also studied the influence of dead layer thickness on energy resolution,and found that thinning dead layer can improve the energy resolution effectively.更多还原