【作者】 侯芳； 王文岩； 刘梓枫； 朱健；

【Author】 HOU Fang;WANG Wenyan;LIU Zifeng;Zhu Jian;Nanjing Electronic Device Institute;Science and Technology on Monolithic Integrated Circuits and Modules Laboratory;

【机构】 南京电子器件研究所； 微波毫米波单片集成和模块电路重点实验室；

【摘要】 本文主要介绍了一种小型化的基于MEMS技术的片上集成开关滤波技术,该芯片由3个分别工作在6.1-7.9GHz、7.9-9.9GHz、9.9-11.9GHz的滤波器和2个PIN单刀四掷开关组成。测试结果表明:开关滤波器导通后中心插损最大约4.7dB,带边1GHz处带外抑制约为40dB。开关芯片尺寸仅为:13mm×12mm×0.8mm,为传统开关滤波组件体积的1/100。考虑工艺误差影响,设计与测试结果吻合良好,该芯片因体积小、性能优可广泛用于射频前端系统。更多还原

【Abstract】 In this paper, we demonstrate an integrated switch filter base on MEMS technology.The switch micromachined filter is composed of two SP4T switches and three filters, the passband of which are 6.1-7.9 GHz, 7.9-9.9 Ghz and 9.9-11.9 GHz respectively.After filters fabricated and switches assembled, the measured results show that the insertion loss at center frequency is less than 4.7 dB and isolation is more than 40 dB beyond the passband.The switch filter is only 13 mm×12 mm ×0.8 mm in size, which is decreased about 99% for integrated MEMS technology.The experimental results match well with the simulation.This switch filter can be extensively used in RF communication system for its small size and high performance.更多还原