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微纳功能结构的椭圆振动金刚石切削技术

Fabrication of micro/nano structures by applying the elliptical vibration cutting with diamond tools

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【作者】 张建国崔涛葛成隋永新杨怀江

【Author】 ZHANG Jianguo;CUI Tao;GE Cheng;SUI Yongxin;YANG Huaijiang;Engineering Research Center of Extreme Precision Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science;

【机构】 中国科学院长春光学精密机械与物理研究所

【摘要】 具有微纳结构的功能表面越来越多的应用于先进光学、先进制造等领域。为了实现微纳结构表面的批量制造,对铁基模具材料微纳加工技术的研究变得尤为必要。由于剧烈的刀具热化学磨损,普通的金刚石切削技术很难用于铁基材料的微纳切削加工。近年来,椭圆振动金刚石切削技术已成功应用于模具钢的超精密切削加工。本文实验验证了铁基材料椭圆振动金刚石镜面切削能力和极小的刀具磨损量。随后将可控振幅椭圆振动雕刻技术应用于微纳结构的车削成型过程,成功获得铁基材料的正弦波、三角波和方波功能表面。

【Abstract】 ;The functional surfaces with the micro/nano structures have been applied to the advanced optics and manufacture engineering.In order to obtain the mass production of the above mentioned micro/nano structures,it is necessary to carry out the investigations of micro/nano machining of the mold materials,especially the steel material.However,it is difficult to apply the ordinary diamond cutting technology to the steel material machining due to the serious thermal-chemical tool wear.Recently,the hardened steel has been successfully machined by applying the elliptical vibration cutting with the single crystal diamond tool.In this paper,the precision machining of steel material is firstly carry out by applying the elliptical vibration cutting technology.The tiny diamond tool wear was experimentally confirmed.Following that,the micro/nano structures,i.e.,sinusoidal,triangular and square structures,are successfully fabricated by applying the amplitude control sculpturing method in the elliptical vibration cutting process.

【基金】 国家重大专项基金资助项目(2009ZX02005)
  • 【会议录名称】 2016年全国超声加工技术研讨会论文集
  • 【会议名称】2016年全国超声加工技术研讨会
  • 【会议时间】2016-10-21
  • 【会议地点】中国辽宁大连
  • 【分类号】TG506
  • 【主办单位】中国机械工程学会特种加工分会超声加工技术委员会
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