【作者】 王艳； 张淑仪； 杨跃涛； 水修基；

【Author】 WANG Yan;ZHANG Shu-yi;YANG Yue-tao;SHUI Xiu-ji;School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications;Lab of Modern Acoustics, Institute of Acoustics, Nanjing University;

【机构】 南京邮电大学电子科学与工程学院； 南京大学声学研究所近代声学实验室；

【摘要】 本文采用RF磁控溅射和水热合成法相结合,沉积ZnO纳米片结构薄膜于36°YX-LiTaO₃基片,研制多层结构的声表面波氢气传感器。利用XRD及SEM分析ZnO薄膜的晶体结构和形貌,表明所制备的ZnO薄膜为多晶结构、且具有纳米片状形貌。该ZnO纳米片薄膜具有大的表面/体积比,极有利于成为气体敏感材料。将研制的声表面波传感器进行室温条件下对氢气的实时传感检测,结果显示该声表面波传感器具有灵敏的氢气传感特性。更多还原

【Abstract】 SAW sensors based on Zn O nano-sheet films deposited on 36°YX-Li Ta O3 piezoelectric substrates are fabricated, in which Zn O nano-structural films are prepared by RF magnetron sputtering and hydrothermal synthesis. The crystal structures and morphologies of the Zn O nano-structural films are analyzed by XRD and SEM. The results show that the prepared Zn O films are with polycrystalline structure and nano-sheet morphology. Due to the large ratio of surface to volume, the nano-sheet films are beneficial to be utilized as gas-sensing materials. Furthermore, the SAW sensors are used for hydrogen sensing at room temperature, and the obtained results indicate that the sensors have good sensing properties.更多还原