【作者】 郝文昌； 刘久玲； 何世堂；

【Author】 HAO Wen-chang;LIU Jiu-ling;HE Shi-tang;Institute of Acoustics, Chinese Academy of Sciences;

【机构】 中国科学院声学研究所；

【摘要】 本文针对检测器金属指条厚度对声表面波传感器性能的影响进行了理论分析。利用有限元方法提取了不同指条厚度下声表面波检测器负载质量的耦合模参量,结合耦合模模型和P矩阵级联技术,仿真了不同指条厚度下检测器对相同负载的频率响应,对比得到了传感器性能最优化时检测器指条的厚度参量。理论优化了声表面波传感器性能,为进一步实验研究奠定了基础。更多还原

【Abstract】 The influence of the detector finger thickness on the performance of a surface acoustic wave(SAW) sensor was analyzed theoretically. By using the finite element method(FEM), the coupling-of-modes(COM) parameters of mass loaded SAW detectors in different finger thickness were extracted. Based on the COM model and P-matrix cascading technique, the corresponding frequency responses were simulated. By the result comparison, the optimal thickness of the finger used in the detector was deduced. The performance improvement of the SAW sensor was realized theoretically, providing a basis for the experiments.更多还原