【作者】 谢英才； 王艳； 张淑仪； 兰晓东；

【Author】 XIE Ying-cai;WANG Yan;ZHANG Shu-yi;LAN Xiao-dong;School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications;Lab of Modern Acoustics, Institute of Acoustics, Nanjing University;

【机构】 南京邮电大学电子科学与工程学院； 南京大学声学研究所近代声学实验室；

【摘要】 建立(110)ZnO/IDT/36?YX-Li Ta O3多层结构延迟线的3D模型,利用有限元方法对该延迟线所激发Love波的传播特性进行仿真研究。结果表明,当声波传播方向与ZnO的c轴垂直且薄膜厚度与波长的比值th/λ=0.044时,Love波机电耦合系数取最大值7.837%。Love波的水平剪切位移分量远大于横向和纵向位移分量,因此基于该结构的Love波传感器可用于液体环境下的传感检测。然后讨论了传播方向对Love波声学特性的影响,分析发现,Love波机电耦合系数随传播方向的变化而变化,当传播方向与ZnO薄膜的c轴夹角θ=30?时,机电耦合系数达到最大值10.054%。更多还原

【Abstract】 The 3D FEM models have been designed to theoretically investigate the propagation characteristics of Love wave in the multilayered structure of（110） ZnO/IDT/36?YX-Li TaO₃ substrate. The calculated results show that a Love wave, propagated along the direction perpendicular to the c-axis of Zn O, has been excited with the maximum electromechanical coupling coefficient（7.837%） at th/λ=0.044. Meanwhile, the shear horizontal displacement component of the excited Love wave is much larger than the transverse and longitudinal displacement components. It indicates that the model can be used for fabricating SH-SAW sensor to detect changes in liquid circumstance. Moreover, the effects of the propagation direction on the acoustic properties have also been studied. It is interesting to note that the electromechanical coupling coefficient of Love wave changes with the propagation direction. And the electromechanical coupling coefficient of 10.054% has been obtained when θ equals to 30?, which is defined as the angel between the propagation direction and the c axis of Zn O.更多还原